Optical Profiler

Strengths of the technique

3D measuring of surfaces
Analysis of roughness or step height (layer thickness)
Contact-free and therefore nondestructive technnique

Technical data

Lateral resolution:	~ 0.5 µm
Vertical resolution:	~ 0.3 nm
Max. field of view:	~ some cm²
Max. step height:	~ 1 mm

Further information

Courses