Scanning Electron Microscopy (SEM, EDS)
Strengths of the technique
- Imaging of surfaces and irregular shaped objects with very high precision and depth of sharpness
- Quantitative element analysis by EDS:
- Point or particle analysis
- Element mapping
Technical data
| SEM | Lateral resolution: | down to 3 nm |
| Acc. voltage: | 0.1 - 30 kV | |
| Detectors: | Secondary, Backscatter and Inlense Detector | |
| EDS | Detectable elements: | all, starting with Boron |
| Detection limit: | ~ 0.1 % | |
| Quantitative: | yes |
|
| Depth of information: | ~ 1 µm (5 nm - 15 µm) |
|
| Lateral resolution: | down to 0.3 µm |
Further information
Courses