Secondary Ion Mass Spectrometry (SIMS)
Strengths of the technique
- Mass spectrometry directly at surfaces: Identification of organic and anorganic compounds
- Specific information fom ultra thin layers (sub-monolayers)
- Identification of contaminations
- Analysis of conducting and non conducting samples
- Analysis of depth profiles
- Imaging
Technical data
| Detectable elements: | all, incl. molecular information |
| Detection limit: | ~ ppm |
| Quantitative: | no / only with standards |
| Depth of information: | ~ 1-3 momolayers |
| Lateral resolution: | down to 0.2 µm |
| Imaging: | yes |