X-Ray Photoelectron Spectroscopy (XPS / ESCA)
Strengths of the technique
- Quantitative analysis of surfaces
- Detection of all elements but H and He
- Chemical state identification: binding and oxidation states
- Applicable to different kind of sample systems like: papers, polymers, metalls, glasses, etc.
- Preparation and analysis of sputter depth profiles
Technical data
| Detectable elements: | all elements, starting with Li and chemical states |
| Detection limit: | 0.01 - 1 At%, sub-monolayers |
| Quantitative: | yes |
| Depth of information: | ~ 5 - 10 nm |
| Lateral resolution: | 3 µm - 2 mm |
| Special feature: | variable sample temperature during analysis between 170 and 1000 °K |
Further information
Application NotesCourses